Grazing-Incident Wide-Angle X-Ray Scattering (GIWAXS)
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Beamline Specifications |
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Item |
Value |
Note |
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X-ray Energy (keV) |
12 |
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X-ray Spot Size (mm) |
10 x 0.3 (H x V) |
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X-ray Flux (photon/sec) |
6 x 1010 |
See figure |
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Resolving Power E/ΔE |
~700 |
Rh-coated, Si-substrate |
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Monochromator |
ACCM |
Si(111), Asymmetric-cut |
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Detector |
SX165 MarCCD |
165 mm diameter |
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Q-range of the small angle (none offset) (1/Å) |
0.05 ~ 0.5 |
Resolution= 0.001 |
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Q-range of the wide angle (none offset) (1/Å) |
0.15 ~ 1.2 |
Resolution= 0.003 |
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GIWAXS Measurement Specifications |
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Item |
Value |
Note |
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X-ray Energy (keV) |
6 ~20 |
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Energy Resolution (ΔE/E) |
1.5 ~ 2.5 x 10-4 |
Si(111) DCM |
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X-ray Spot Size (mm) |
1 x 1 |
Adjustable by slit system |
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X-ray Flux (photon/sec) |
8 x 1010 ~ 2 x 1012 |
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Sample Size (mm) |
Up to 4 inch wafer |
GIWAXS mode |
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Incident Angle (degree) |
0.05 ~ 2 |
Customer request |
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Detector |
PILATUS3S 2M Si-sensor 450 μm |
Dectris Ltd. |