Grazing-Incident Wide-Angle X-Ray Scattering (GIWAXS)

Grazing-Incident Wide-Angle X-Ray Scattering (GIWAXS)

Beamline Specifications

Item

Value

Note

X-ray Energy (keV)

12

 

X-ray Spot Size (mm)

10 x 0.3 (H x V)

 

X-ray Flux (photon/sec)

6 x 1010

See figure

Resolving Power E/ΔE

~700

Rh-coated, Si-substrate

Monochromator

ACCM

Si(111), Asymmetric-cut

Detector

SX165 MarCCD

165 mm diameter

Q-range of the small angle (none offset) (1/Å)

0.05 ~ 0.5

Resolution= 0.001

Q-range of the wide angle (none offset) (1/Å)

0.15 ~ 1.2

Resolution= 0.003

Grazing-Incident Wide-Angle X-Ray Scattering (GIWAXS)

GIWAXS Measurement Specifications

Item

Value

Note

X-ray Energy (keV)

6 ~20

 

Energy Resolution (ΔE/E)

1.5 ~ 2.5 x 10-4

Si(111) DCM

X-ray Spot Size (mm)

1 x 1

Adjustable by slit system

X-ray Flux (photon/sec)

8 x 1010 ~ 2 x 1012

 

Sample Size (mm)

Up to 4 inch wafer

GIWAXS mode

Incident Angle (degree)

0.05 ~ 2

Customer request

Detector

PILATUS3S 2M 

Si-sensor 450 μm

Dectris Ltd.

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