The Excillum Meta
- Amount conversion
|Target material2||Liquid metal alloy||Min. focal spot size||< 10 μm (~5 µm offered on request)|
|Target type||Liquid jet||Emission stability4||< 1%|
|Voltage||21-70 kV||Position stability4||< 1 μm|
|Power3||0-200 W||Min. focus-object distance5||18 mm|
|Max current||4.3 mA||Beam angle6||13°|
2) Room temperature liquid gallium alloys consist mainly of gallium, indium and tin. They have low reactivity and low toxicity but should be handled according to their safety data sheets and local regulations. The currently available anode alloys are ExAlloy G1 with 95% gallium and ExAlloy I1 with 21% indium (see typical emission spectra on next page).
3) The actual power used is dependent on spot-size and voltage. Maximum power allowed by the software is 200 W, however, maximum output power of the 70 kV high-voltage generators is 300 W.
4) Standard deviation.
5) Without a shutter (24.8 mm with shutter).
6) Without a shutter (10.5° with shutter).
|Available target alloys|
7) Operation of ExAlloy-I2 requires that the MetalJet source is equipped with a heater system since the melting point is above room temperature. Due to this requirement the MetalJet sources with ExAlloy-I2 are under limited availability. Please contact us for further information.
|Spot stability over 24 h||Spot shape example||
Emission Spectra at 50 W, 70 kV, 20 µm (0.1 keV bin width)