NanoTube N3

Description

The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved every time, every day.

The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.

Specification

TWD /Unit

交期：

加入購物車 聯絡我們
SG 匯率表
幣別
金額換算
新台幣 (TWD)
0
美金 (USD)
0
歐元 (EUR)
0
瑞士法郎 (CHF)
0
日圓 (JPY)
0
人民幣 (CNY)
0
英鎊(GBP)
0
澳幣(AUD)
0
新加坡幣(SGD)
0
加拿大幣(CAD)
0
紐元(NZD)
0

NanoTube N3 60kV
Technical specifications
Voltage 40-60 kV Max. power on target 2.4 W
High brightness emitter LaB6 Target material Tungsten (W) on diamond
Min. resolution 150 nm Target type Transmission
Min. focus-object distance 150 µm Long term spot stability < 100 nm1

1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.

NanoTube N3 110 kV
Technical specifications
Voltage 40-110 kV Max. power on target 6.1 W
High brightness emitter LaB6 Target material Tungsten (W) on diamond
Min. resolution 150 nm Target type Transmission
Min. focus-object distance 150 µm Long term spot stability < 100 nm1

1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.

NanoTube N3 160 kV
Technical specifications
Voltage 40-160 kV Max. power on target 11 W
High brightness emitter LaB6 Target material Tungsten (W) on diamond
Min. resolution 150 nm Target type Transmission
Min. focus-object distance 150 µm Long term spot stability < 100 nm1

1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.

 

返回
↑
(0)