產品新訊

科傳即將接收世界最小光斑高能X光源-Excillum NanoTube N3 160 kV

The highest imaging resolution across the full voltage range

The Excillum NanoTube N3 enables industry-leading resolution and stability in geometric-magnification X-ray imaging systems with no need for manual tuning.

The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is achieved every time, every day.

The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.

True round spot

The true round spot of the NanoTube N3 is demonstrated by the highly symmetric images of a Siemens star resolution target. The innermost features are 150 nm.

The image on the left shows a SEM micrograph of a Siemens star and an X-ray projection radiograph is shown on the right.

Long term positional stability

Thanks to the advanced e-beam system of the NanoTube N3 and the integrated thermal control, excellent long-term stability is achieved. This graph illustrates the motion of the spot relative to a fix point on the anode over 8 hours as measured internally by the source when at thermal equilibrium. Naturally, great care must be taken regarding the stability of the imaging system to maintain the same stability throughout the imaging chain.

Excellent geometrical access

The end of the transmission target is the most protruding surface to allow for a sample to get as close as possible to the X-ray focal spot.

The front is furthermore cone-shaped to allow for a sturdy cone-shaped sample holder.

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