Tender X-ray Photoelectron Spectroscopy (TX-XPS, 1.75~6 keV)

X-ray Photoelectron Spectroscopy (XPS) is an inspection technique to used for quantitative determine atomic composition and its chemistry located near the sample surface. The working principle is irradiating a monochromatic X-rays on the sample to kick out photoelectrons and measure the kinetic energy of electrons to determine core level of elements which these electrons come from.

Tender X-ray Photoelectron Spectroscopy (TX-XPS, 1.75~6 keV)

Synchrotron radiation source has the advantage of being able to adjust the X-ray energy incident upon samples. According to the diagram on the left of the electron kinetic energy and mean free path, the effective penetration depth will also vary with different X-ray energies.
Meanwhile, the traditional laboratory XPS analysis requires removing the specimen surface to measure deeper signals. Hence, this may also damage the structure of the sample and affect its characteristics.
Synchrotron XPS can use continuous energy adjustment to detect sample signals at different penetration depths without destroying the surface structure of the sample. Therefore, It ensures the integrity of the sample structure and the signal authenticity. 

Tender X-ray Photoelectron Spectroscopy (TX-XPS, 1.75~6 keV)

Beamline Specifications




X-ray Energy (keV)

1.75 ~ 6

InSb(111): 1.75~3.5

Ge(111): 2~6

Si(111): 2.1~5

X-ray Spot Size (mm)

1 x 2

Adjustable by slit system

X-ray Flux (photon/sec)

1 x 109 ~ 5 x 1010

See figure

Sample Plate Size (mm)

15 x 18 

(Usable 14 x 14)

Maximum sample size limited to 12 x 12 mm




Tender X-ray Photoelectron Spectroscopy (TX-XPS, 1.75~6 keV)

Transfer Vessel Specifications




Transfer Condition

Purge N2 gas

Sample will prepare and mounted on sample plate in groove box with dry N2 flow at low oxygen and water vapor condition

Maximum Sample Plate


Each plate can mount 1~4 sample depend on its size

Maximum Sample Height (mm)



Material of Sample Plate

Al, Fe, Mo, Ti, Ta

Depend on measure energy of X-rays

Experimental Details




Pumping Down Time (min)

30 ~ 60

Maximum 7 sample plate in one vacuum vessel

Sample Transfer Time (min)

15 / 15

In and out of analysis and load-lock chamber

Sample Alignment Time (min)


This will be apply multi-times when change energy

Change Probe Energy (min)


For depth profiling (3-spectra for 40 min and 5-spectra for 80 min)

Spectrum Scan Time (min)

5 ~ 15

5-scan average, cover 20 eV range

Detection Limit (ppm)

< 1

Need longer aquicticon time