Tender X-ray Photoelectron Spectroscopy (TX-XPS, 1.75~6 keV)
X-ray Photoelectron Spectroscopy (XPS) is an inspection technique to used for quantitative determine atomic composition and its chemistry located near the sample surface. The working principle is irradiating a monochromatic X-rays on the sample to kick out photoelectrons and measure the kinetic energy of electrons to determine core level of elements which these electrons come from.
Synchrotron radiation source has the advantage of being able to adjust the X-ray energy incident upon samples. According to the diagram on the left of the electron kinetic energy and mean free path, the effective penetration depth will also vary with different X-ray energies.
Meanwhile, the traditional laboratory XPS analysis requires removing the specimen surface to measure deeper signals. Hence, this may also damage the structure of the sample and affect its characteristics.
Synchrotron XPS can use continuous energy adjustment to detect sample signals at different penetration depths without destroying the surface structure of the sample. Therefore, It ensures the integrity of the sample structure and the signal authenticity.
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Beamline Specifications |
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Item |
Value |
Note |
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X-ray Energy (keV) |
1.75 ~ 6 |
InSb(111): 1.75~3.5 Ge(111): 2~6 Si(111): 2.1~5 |
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X-ray Spot Size (mm) |
1 x 2 |
Adjustable by slit system |
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X-ray Flux (photon/sec) |
1 x 109 ~ 5 x 1010 |
See figure |
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Sample Plate Size (mm) |
15 x 18 (Usable 14 x 14) |
Maximum sample size limited to 12 x 12 mm |
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Detector |
PHOIBOS 150 CCD |
SPECS |
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Transfer Vessel Specifications |
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Item |
Value |
Note |
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Transfer Condition |
Purge N2 gas |
Sample will prepare and mounted on sample plate in groove box with dry N2 flow at low oxygen and water vapor condition |
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Maximum Sample Plate |
7 |
Each plate can mount 1~4 sample depend on its size |
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Maximum Sample Height (mm) |
5 |
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Material of Sample Plate |
Al, Fe, Mo, Ti, Ta |
Depend on measure energy of X-rays |
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Experimental Details |
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Item |
Value |
Note |
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Pumping Down Time (min) |
30 ~ 60 |
Maximum 7 sample plate in one vacuum vessel |
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Sample Transfer Time (min) |
15 / 15 |
In and out of analysis and load-lock chamber |
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Sample Alignment Time (min) |
5 |
This will be apply multi-times when change energy |
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Change Probe Energy (min) |
20 |
For depth profiling (3-spectra for 40 min and 5-spectra for 80 min) |
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Spectrum Scan Time (min) |
5 ~ 15 |
5-scan average, cover 20 eV range |
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Detection Limit (ppm) |
< 1 |
Need longer aquicticon time |